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M3-RS-U piezoelectric mirror positioner

M3-RS-U Rotary Stage positioning module with mirror: The easy, all-in-on solution, with closed-loop controller built in to the microstage.

M3-RS Rotary Smart Stages

Piezoelectric micro stages with embedded drive electronics offer high precision, smallest size and unmatched ease of use

New Scale rotary micro stages and positioning modules feature our patented piezoelectric motors along with position sensors, bearings, drive electronics and embedded firmware are all integrated into a compact positioner - no external controller required. Along with smallest system size, this makes for fast, easy integration into your system.

Advantages


Beam Steering Developer's Kit

 

Two-axis beam steering - A two-axis, two-mirror beam steering system featuring two ultra-compact rotary piezo microstages with embedded controllers for smallest size, maximum ease of use.

VIDEO: beam steering developer's kit

Watch the video - Beam steering and mirror positioning developer's kits (3:33).

Beam Steering and Mirror Positioning Developer’s Kits 

Using M3-RS-U smart stages for beam steering and mirror positioning, you get a familiar galvo-scanner form factor with a drastically smaller size: only 12 mm diameter including the embedded closed-loop controller.

The mounted aluminum-coated mirror moves  +/- 20 degrees at up to 1100 degrees per second with accuracy of 0.25 degrees for precise, point-to-point positioning or dynamic scanning up to 100 Hz. 

Two-Axis Two-Mirror Beam Steering Developer’s Kit

The DK-M3-RS-U-2M-20-L Beam Steering System Developer’s Kit includes two smart stages, mounted mirrors, a 650nm collimated laser, base, demo board, cables, USB adapter and software for system evaluation and development.

Learn more

 


M3-RS mirror positioner

One-axis mirror positioning - A single-axis mirror positioning system featuring an ultra-compact rotary piezo stage with embedded controller for smallest size, maximum ease of use.

Single-Axis Mirror Positioning Developer's Kit

The DK-M3-RS-U-1M-20 Mirror Positioning Developer’s Kit includes a smart stage, mounted mirror, base, breakout board, cables, USB adapter and software for system evaluation and development. 

 

Learn more


Specifications for Beam Steering and Mirror Positioning Developer's Kits 

 

Performance for M3-RS-U Smart Stage with standard 3-mm long mounted mirror

Beam diameter (max)  2 mm
Range of motion +/- 20 degrees
Speed  >1100 deg/sec  
Acceleration >1,000,000 deg/sec² (note 1)
Stall torque (min) 0.04 N-mm
Holding torque (min) 0.08 N-mm (zero power)
Recommended maximum payload mounted to rotating shaft (payload must be balanced) 
Mass 3 g  
Inertia 350 g-mm²  
CLOSED-LOOP performance (with built-in position sensor) 
Recommended step frequency up to 100 Hz
Resolution (encoder resolution) 0.025 deg (440 µrad) absolute 
Repeatability +/- 0.05 deg (880 µrad)
Accuracy  0.25 deg (4400 µrad)
Maximum closed loop step & settle times (note 1) 

0.5 deg step: 9 ms
5 deg step: 14 ms
20 deg step: 21 ms 

OPEN-LOOP performance (external position sensor provided by user - see application note)
Resolution  <0.0057 deg (<100 µrad) 
Accuracy Typically better than 10% of distance travelled after calibration
Maximum open loop step times (note 1)

0.05 deg step: 0.5 ms
0.5 deg step: 1.6 ms
5 deg step: 6 ms
20 deg step: 10 ms 

Input voltage 3.3 VDC
Power consumption (typical)
 input directly to stage

500 mW active, moving
190 mW active, ready
 50 mW standby

Power consumption (typical)
 input via USB interface

Break-out board (one-axis developer's kit)

675 mW active, moving
365 mW active, ready
150 mW standby

Demo board (two-axis developer's kit)

1200 mW active, both axes moving
580 mW active, ready
200 mW standby

Stage mass  3 g
Operational lifetime  > 2,000,000 random positions  (note 2)
Temperature and relative humidity  0 to +60 °C, non-condensing 
Controller Integrated into stage, 64 MIPS
no external controller needed
Communication interface I²C, SPI, UART or analog servo
Input directly to M3-RS

Note 1:  With 0.99 g-mm2 inertial load of standard mounted mirror M3-RS-U-Mirror-01-11

Internal Stage .....0.39 g-mm2

Mirror Clamp ..... 0.45 g-mm2

Mirror ..... 0.15 g-mm2

Total Inertia....  0.99 g-mm2
Note 2:  Significantly longer life may be available depending on the use case. Please consult the factory

 

 Standard Mirror (included in the kit)

Size - M3-RS-U-Mirror-01-03 (included in both dev kits)

3 x 5 x 0.4 mm

Size - M3-RS-U-Mirror-01-11 (included in two-axis dev kit only) 11 x 5 x 0.4 mm
Material float glass
Coating protected aluminum (MgF2)
Operational bandwidth 0.350 - 4.0 μm
 R(avg) reflectivity (0.350 - 4.0 μm)  90%
Max beam diameter 2 mm
Flatness (632 nm)  lambda/4 over any 2 mm length
Surface quality  60 - 40 scratch / dig
CW damage threshold (4 μm)

6 W/cm²

Pulsed damage threshold (1 μsec pulses, 35 nm, 20 Hz

0.3 J/cm²

 

 

Ordering Information

Model  Description Buying options
DK-M3-RS-U-2M-20-L

Developer's kit, two-axis two-mirror beam steering system

- Two M3-RS-U-360 Rotary Stage Positioning Modules with embedded controllers and straight FPC
- One M3-RS-U-Mirror-01-03, mounted to stage
- One M3-RS-U-Mirror-01-11, mounted to stage
- One 650nm collimated laser
- Base
- Demo board and cables for testing and USB connection
- Power supply
- New Scale Pathway™ Software

Buy from Digi-Key

Buy from Mouser

DK-M3-RS-U-1M-20

Developer's kit, single-axis mirror positioning system

- One M3-RS-U-360 Rotary Stage Positioning Module with embedded controller and straight FPC
- One M3-RS-U-Mirror-01-03, mounted to stage
- Base
- Breakout board for testing and USB connection
- Cables and USB adaptor for PC control
- New Scale Pathway™ Software

Buy from Digi-Key

Buy from Mouser

Optional components*
M3-RS-U-Mirror-01-03 Mounted mirror, 3 x 5 x 0.4 mm
Inertia 0.50 g-mm²
Standard mirror, one included with one-axis or two-axis kit
Contact us
M3-RS-U-Mirror-01-11

Mounted mirror, 11 x 5 x 0.4 mm
Inertia 0.60 g-m
Standard mirror, one included with two-axis kit only

Contact us
M3-RS-U-FPC-0-150 FPC cable with straight exit from stage
150 mm length (standard cable, one included with stage)
Contact us
M3-RS-U-FPC-90-150 FPC cable with 90° exit from stage
150 mm length (optional cable)

Contact us

* Each stage in the above developer's kits includes one mounted mirror, pre-attached to the stage. You may order additional mounted mirrors  if desired. Tools to attach the mounted mirrors to the stage are included in the kit.

Each stage includes a flexible printed circuit cable. You may purchase cables in other lengths, with straight or 90-degree exit angles

 

 



M3-RS rotary piezo stage

M3-RS-U-360 Rotary Stage Positioning Module

The M3-RS-U rotary smart stage is also available separately, without mirror or accessories. Without mirror mount limit stops the stage has a continuous 360° rotation. Only 12 mm in diameter, this smart stage is ideal for scientific and industrial applications requiring precise rotational positioning in a limited space.

Applications include optical tuning with gratings or filters, and sample alignment.

Download the data sheet with drawings (PDF) 
Download the CAD file (registration required)

Ordering Information

Model  Description Buying options
M3-RS-U-360

Rotary Stage Positioning Module

Rotary smart stage with embedded controller and straight FPC

 Contact us
M3-RS-U-FPC-0-150 FPC cable for M3-RS-U-360
straight exit from stage
150 mm length (standard cable, one included with stage)
Contact us
M3-RS-U-FPC-90-150 FPC cable for M3-RS-U-360
90° exit from stage
150 mm length (optional cable)

Contact us


M3 Smart Module platform

The M3-RS rotary stage is built on New Scale’s M3 micro-mechatronic "smart module" platform, integrating a piezoelectric  SQUIGGLE® micro motor, precision mechanical guide system, position sensor, microprocessor, and drive electronics into one tiny package. Eliminating the need for external controllers, M3 smart modules offer the smallest system size and easiest integration into OEM systems. They operate on 3.3 V DC input, accept high-level motion commands, and hold position with power off.

Contact us today to discuss your precision rotary micro positioning and beam steering requirements.